Wafer Processing

Photovoltaic

High Brightness LED & MEMs Products

Package and Tests

Upstream Products

Downstream Products

Gas Turbines

Steam Turbines

HRSG Sensors

Power Pipping

Furnace & Autoclaves

Freeze Dryers (Lypholizers)

Case Studies - Cement Kiln Sensor

Case Studies - Pump Assembly

1. Process Temperature Control in Diffusion and Oxidation Furnace using Profile Thermocouple

Customer Requirement
Our customer using diffusion or oxidation furnaces needed a 3-zone or 5-zone profile thermocouple to accurately control process temperatures inside the furnaces.

Conax Semiconductor Solution
Conax offers profile thermocouples for both vertical and horizontal furnaces. Sheath material is semiconductor grade quartz in 8mm, 10mm or 12mm outside diameters. The quartz sheaths may be equipped with a 28/15 quartz socket for mating up to quartz ball joint for furnaces that require this specification.

The internal thermocouples can populate either a single 6-hole or 10-hole insulator. Alternatively, the wires can populate three or five 2-hole insulators. Standard thermocouple calibration types include R, S, B and K. Various wire diameters are available to offer the customer the best balance between low price and thermocouple life.

2. Zone Calibration with Triple Point Thermocouples

Customer Requirement
Owners of vintage Applied Materials or Moore Technologies Epitaxial Barrel Reactors need to calibrate the infrared temperature which control the temperature of the wafer susceptor. There are 3 heating-zones and 3 infrared sensors which need to be calibrated.

Conax Semiconductor Solution
The Triple-Point Calibration Thermocouple allows monitoring of all three separate temperature zones within the reactor using a single probe. A tapered sheath ensures the proper location of the thermocouple measuring junctions in relationship to the corresponding infrared sensors inside the guide hope of the susceptor. The original design uses C-type Tungsten/Rhenium thermoelements to supply accurate operation in the 1200°C environment. An inert-gas backfill protects the thermoelements from high temperature oxidation.

Custom designs utilizing other thermoelements and additional junction locations are also available. Special sheath materials may also be provided.

3. Fiber Optic Vacuum Feedthrough for Laser Interferometer Manufacturer

Customer Requirement
Laser interferometer manufacturer makes precise controls for stage movement as node sizes continue to reduce. Certain photolithography tools have stage in vacuum environment. In these cases, the laser beam needs to be introduced into and out of the evacuated stage area through fiber optic cables.

Conax Semiconductor Solution
Conax offered a multi-hole feedthrough to allow multiple fibers to be fed through a single flanged connection. Each fiber is sealed inside a stainless steel tube and the tube is subsequently sealed in the compression fitting. This method allows a high vacuum seal while inducing a low dB loss based on the seal. This allows more signals to be used from a single laser input.

4. Low-Cost Single-Junction Calibration for Multiple Heating Zone with Single-Point Calibration Thermocouple

Customer Requirement
Owners of vintage Applied Materials or Moore Technologies Epitaxial Barrel Reactors need to calibrate the infrared temperature sensors which control the temperature of the wafer susceptor. There are 3 heating-zones and 3 infrared sensors which need to be calibrated. Customer desires to have a low-cost, single-junction thermocouple that can be used for different versions of the reactor with heating zones at different locations.

Conax Semiconductor Solution
The Single-Point Calibration Thermocouple allows monitoring of all three separate temperature zones within the reactor by repositioning a single-junctioned thermocouple at each zone. A small-diameter sheath ensures adequate clearance of the thermocouple sheath inside the guide hole of the susceptor. This thermocouple uses a K-type thermoelement with a Haynes 214 sheath.

5. Keep Sensing Tip in Place in Ion Implant Tool using Thermocouples with Spring Loading

Customer Requirement
Customer needs to monitor temperature inside an implant tool where repeated heating and cooling often cause movement of parts, resulting in thermocouple tips to detach from monitoring surface. The challenge is to keep the sensing tip in contact with the monitored surface while these involuntary movements occur.

Conax Semiconductor Solution
Conax designed a Spring Loaded thermocouple with off-set plug to keep thermocouple sensing tip in contact with surface to be monitored and used an off-set plug to allow for limited space constraints.

Custom designs utilizing other thermoelements and additional junction locations are also available. Special sheath materials may also be provided.

6. Process Temperature Control in Diffusion and Oxidation Furnace using Profile Thermocouple

Customer Requirement
Customer needed to monitor and control multi-zone heating elements on the outside of furnace.

Conax Semiconductor Solution
Conax offers a wide range of spike thermocouples to meet this need, including single and dual spike thermocouples. These thermocouples are available in any desired length, several standard diameters and with varying wire diameters and calibrations including R, S, B and K.

7. Provides Longer-life alternative to the OEM's standard thermocouple with Thermocouples for the ASM Epsilon® Epitaxial Reactor

Customer Requirement
Customer desires a longer-life alternative to the OEM's standard thermocouple offering. Customer also desires a supplier with inventory levels that allow same-day shipment on parts.

Conax Semiconductor Solution
In response to our customer's desire to find high-quality aftermarket suppliers for thermocouples for the ASM Epsilon® Reactor, Conax has developed an extensive line of thermocouples that range from offering OEM equivalent products to high-end products that offer longer quartz and wire life as compared to the OEM standard. Specialized versions have also been created to address specific needs/requirements for individual Fabs.

Conax also has an extensive stock of units on the shelf to allow for same-day shipment in many cases. This can help a Fab in an emergency situation as well as allow lower inventory levels needed on the Fab's shelf.

The internal thermocouples can populate either a single 6-hole or 10-hole insulator. Alternatively, the wires can populate three or five 2-hole insulators. Standard thermocouple calibration types include R, S, B and K. Various wire diameters are available to offer the customer the best balance between low price and thermocouple life.

1. Rebuildable Molybdenum Electrode

Customer Requirement
Former ceramic-to-metal seal flanged electrode was delicate and cracked too easily. There was also no easy way to remove the electrode after use due to deposition build up. Former practice was to cut the electrode off inside the reactor which caused much particle generation and an unsafe environment for service technicians.

Conax Semiconductor Solution
Conax designed an electrode that may pass through the flange assembly, so it may be removed by sliding through the flange and into the reactor. This eliminates any cutting operations needed to remove the electrode and allows reuse of the flange/sealant assembly. There is also no fragile ceramic to metal seal to crack or fail, resulting in a more robust reactor.

2. Multi-hole Compression Seal Fitting for Easy Replacement and Reduced Production Cost

Customer Requirement
Introduce thermocouple wires through high vacuum boundary in a PV thin film coating application. Also reduce electrical noise in wiring on the outside of the process chamber.

Conax Semiconductor Solution
Conax used a multi-hole compression seal fitting/flange assembly to seal on the wires and to the customer's process chamber. This product allows rebuilding of the fitting with new wires as wires eventually become damaged in use, saving expenses on future needs. A shield was also added over the bundle of wires that leave the fitting and travel to a termination box. Inside this termination box a drain wire attached to the shielding allows for proper grounding.

3. Custom Length Electrode Feedthrough for High Vacuum PV Thin Film Coating Process Chamber

Customer Requirement
Customer needed to power heating elements in a high vacuum PV thin film coating process chamber. High-temperature insulation is needed to prevent deposition from coating and shorting the electrode to the process chamber.

Conax Semiconductor Solution
Conax uses a standard high temperature flanged compression seal fitting with alumina insulators. A custom length electrode was specified by the customer and an alumina extension insulator was also supplied as part of the assembly.

1. Thermocouple for High Vacuum Conditions without the Risk of Vacuum Leak

Customer Requirement
Control furnace process temperature under high vacuum conditions. Due to process conditions, the thermocouple may sometimes be hit during processing. In these cases, a broken alumina sheath would allow a gross vacuum leak into the process chamber and cause loss of product currently under production. The Furnace has a vacuum flange process connection.

Conax Semiconductor Solution
Conax has designed a special "Combo Fitting" integrated into a vacuum flange. The Combo Fitting has a seal for the thermocouple sheath as well as for the thermocouple wires (thermoelements). In this way, if the alumina sheath were to be broken, there will be no vacuum leak into the reactor chamber causing loss of materials currently in process.

2. Proper Shipment of Copper Electrode

Customer Requirement
Customer who ordered Water Cooled Copper Electrode knows that proper packaging and shipment is extremely important. Most of our competing suppliers deliver this machined part improperly packaged. Insufficient packaging causes dents that both aesthetically and functionally damage the part. Proper cleaning is another essential step to ensure the part arrives ready-to-use.

Conax Semiconductor Solution
Conax worked with customer to finalize a cleaning and packaging process that allows this product to be shipped and received in usable condition.

3. Precise Verification of Junction Location of Thermocouple with Molybdenum Sheath

Customer Requirement
Customer needed Molybdenum sheathed thermocouple that can operate in temperatures ranging from 1200°C - 1500°C with accurately located thermocouple measurement junction. If junction location varies within sheath, this affects the temperature reading of the reactor and can result in a reduction in productivity.

Conax Semiconductor Solution
The internal design of this thermocouple positively locates the measurement junction.  Additionally, Conax x-rays each thermocouple to provide redundant verification of the junction location.  Finally, Conax worked with the customer to finalize a cleaning and packaging process that allows this product to be shipped and received in usable condition.

1. Exhaust Gas Sensors and Blade Path Sensors

Exhaust Gas Sensor	Blade Path Sensor
Frame 5 Series EGT Sensor	Frame 7 Series EGT Sensor

These type K ungrounded thermocouples are manufactured using Special (+/-0.4%) limits and have a time response of 1.7 to 4.0 seconds depending on the tip configuration. Conax Technologies manufactures these exhaust thermocouples with tip diameters from .062 diameter to .125. They are used on all heavy duty gas turbines and are of the latest configuration for easy replacement. Just connect Conax's thermocouple to the flexible, stainless steel braided cable for quick installation and longer life.

All specification qualified exhaust gas and blade path thermocouples are manufactured from ASTM E585 thermocouple materials utilizing the highest purity insulation material yielding superior insulation resistance at elevated temperatures.

The thermocouples are manufactured and tested at various points during the manufacturing cycle ensuring the highest possible level of quality. Product testing includes helium leak testing, calibration, thermal shock, insulation resistance and hermeticity testing of sealing points.

Featuring Type K conductor wire with MgO insulation, hermetically sealed in stainless steel for high-temperature oxidation resistance, vibration resistant hermetic terminations and high reliability mineral insulated cable.

Conax Technologies also manufactures exhaust thermocouples using other configurations. Simply supply the drawing number you have and utilize our short cycle turn around time.

These exhaust gas thermocouples, like all of our products, are manufactured in the United States of America.

2. Wheelspace, Disc Cavity and Compressor Discharges Thermocouples

Wheelspace Sensor Assembly

Conax Technologies' thermocouples for this application meet the operational and performance requirements per the OEM specifications as replacements on heavy duty gas turbines. These cost effective thermocouples are designed to be hermetically sealed to provide a more reliable product that eliminates IR failures. The positive stop at the tip of the thermocouple eliminates any fretting problems. Conax's wheelspace, disc cavity and C.D.T. thermocouples are manufactured using a stainless steel sheath, MgO insulation with type K conductors to ensure the robust design needed in this application.

All specifications qualified thermocouples are manufactured from ASTM E585 thermocouple material utilizing the highest purity insulation materials yielding superior insulation resistance at elevated temperatures. The thermocouples are manufactured and tested at various points during the manufacturing cycle, ensuring the highest possible level of quality.

Production testing includes helium leak testing, calibration, thermal shock, insulation resistance and hermeticity testing of sealing points. Conax Technologies also manufactures these type thermocouples using other configurations. Simply supply the drawing number you have and utilize our short cycle turn around time. These thermocouples, like all of our products, are manufactured in the United States of America.

3. Bearing Sensors and Seals

Bearing Sensor Assembly

These sensors are for embedded applications where temperature monitoring is critical to machine performance and reliability. Available with RTDs or thermocouple types J, K, T and E. The unique bearing sensor wire seal prevents migration of oil along the sensor leads.

4. Air Inlet or Oil Temperature Sensor

Air Inlet or Oil Temperature Sensor

All specification qualified air inlet thermocouples are manufactured from ASTM E585 thermocouple material utilizing the highest purity insulation material yielding superior insulation resistance and sensor repeatability. The thermocouples are manufactured and tested at various points during the manufacturing cycle ensuring the highest possible level of quality.

1. Eye Drop Production

Customer Requirement
The production of eye drops requires periodic sterilization of the bottle filling station with careful monitoring of the steam used for sterilization. The bottle filling station uses 20 nozzles to fill a progressive line of plastic bottles. Periodically, the nozzles are lowered into the sterilization chambers located directly below the station. Here the nozzles are exposed to steam to sterilize them. In this SIP (sterilize in place) application, the environment to be measured consists of 80º C purified water followed by 123º C clean steam at 20 psi for 30 minutes. The customer had to ensure that the sterilization process kept the equipment at 123º C for 30 consecutive minutes. The customer was experiencing problems with the accuracy of the temperature readings. They approached their local Conax representative to see if we could correct their problem.

Conax Design Solution
Upon investigation, Conax engineers quickly realized that the problem was due to the insertion depth of the sensor element. The customer's probe used a wirewound RTD element. Because of the construction of a wirewound element and the way the customer had located the probe into the steam flow, the element was not far enough into the stream to give a correct reading.

Conax solved the problem by providing a probe with a thin film RTD element. With a thin film element, the tube is created first, then the element is placed and the tube is filled with Al2O3 powder around the element. The entire assembly is then sealed with a potting compound. This process allows the element to be placed at the very end of the probe. In an application such as this one, with very little space allowed for probe immersion, the thin-film style probe assures superior accuracy in the temperature readings.



Notice the very small immersion length of the probe into the steam stream. Very little of the wirewound RTD element on the left was actually immersed in the steam. The thin film element can be fully immersed into the measurement area.

2. Conax Expertise With Sealing & Temperature Measurement Solves Multiple Problems For Customer

Application
Autoclave

Customer Requirement
A customer called looking to replace a wire seal fitting purchased from one of our competitors. The customer was experiencing leakage problems with the fitting, which was part of an assembly using RTD probes to measure temperature within an autoclave.

Conax Design Solution
Conax determined that our TG gland with 12 wires was the solution to the immediate problem. The customer had been using 28 AWG stranded wire. Conax recommended a change to 24 AWG solid wire to ensure a better seal.

After further discussion on exactly how he was using the fitting, Conax discovered that the customer was purchasing a threaded fitting and sending it our to have the threads removed and a 2 inch triclover sanitary flange added. Once the fitting returned, the customer would thread the wires through the fitting and attach the probes. Our sales rep explained that Conax could provide the entire fitting, with the flange and all necessary wiring ready for installation.

Additional conversation resulted in a request that Conax quote on the RTD probes as well. During this process, we discovered that the original RTD probe design included a heat shrink wrap where the leadwire attached to the element. This was further aggravating the leakage problem, as moisture could get under the heat shrink. Conax recommended a complete 3 wire RTD assembly using an encapsulated design rather than the heat shrink. The probe is connected to 24 AWG Teflon-insulated leadwire that extends 30 feet, passes through the TG fitting with a sanitary flange, and then extends an additional 32 feet to the control panel. The entire assembly is pre-assembled, providing the customer with a significant savings in labor.

3. RTD Assembly Design Inhibits Moisture Ingress and Reduces Sensor Failure

Application
Sterilization

Customer Requirement
An RTD assembly was needed to monitor product temperature by piercing a sealed bottle within a sterilization chamber. When not monitoring product temperature, the assembly was also used to monitor internal chamber temperatures. Process temperatures reached 134°C.

Conax Design Solution
Conax provided a 3-wire, 100 ohm platinum RTD assembly with a 4" long chisel point tip. The assembly consists of a sealed T3 termination, with 10 foot of treated silicone insulated cable that prevents moisture penetration, and a 0.125" diameter 316SST sheath. The assembly offers ±0.12% ohms accuracy @ 0°C. A Conax PG2 sealing gland seals the cable exiting the chamber. This product, one of the available configuration options of the Conax "Sterisensor," provides superior quality at a very competitive price.

4. Chisel Point RTD Monitors Temperature by Piercing A Sealed Bottle

Application
Monitoring internal chamber and product temperatures up to 134° C during the sterilization process.

Customer Requirement
An RTD assembly was needed to monitor product temperature by piercing a sealed bottle. When not monitoring product temperature, the assembly was also used to monitor internal chamber temperatures.

Conax Design Solution
Conax provided a 3 wire, 100 ohm platinum RTD assembly with a 4" long chisel point tip. The assembly consists of a sealed T3 termination, with 10 foot of treated silicone insulated cable that prevents moisture penetration, and a 0.125" diameter 316SST sheath. The assembly offers ±0.12% ohms accuracy @ 0° C. A Conax PG2-187-A-V seals the cable exiting the chamber. This product, one of the available configuration options of the Conax "Sterisensor," provided this customer with superior quality at a very competitive price. More than 500 units have been supplied over the past three years.